| |
| 2005 | ||
|---|---|---|
| 1 | EE | Changxue Wang, Peter Sherman, Abhijit Chandra: Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation. IJMTM 7(5/6): 504-529 (2005) |
| 1 | Abhijit Chandra | [1] |
| 2 | Peter Sherman | [1] |