Peter Sherman

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2005

1 EE Changxue Wang, Peter Sherman, Abhijit Chandra: Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation. IJMTM 7(5/6): 504-529 (2005)

2005
1	EE	Changxue Wang, Peter Sherman, Abhijit Chandra: Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation. IJMTM 7(5/6): 504-529 (2005)

Coauthor Index

1 Abhijit Chandra [1]

2 Changxue Wang [1]