Leon J. P. Vogels

1998
1	EE	Leon J. P. Vogels, M. W. C. Dohmen, P. Van Duijvenboden, Robert A. Latimer, J. D. O. Heffernan: A Yield Improvement Program Using Process Control and Process Optimization for Particle Reduction Using In Situ Particle Monitoring on a Semitool Magnum. DFT 1998: 11-16

Coauthor Index

1	M. W. C. Dohmen	[1]
2	P. Van Duijvenboden	[1]
3	J. D. O. Heffernan	[1]
4	Robert A. Latimer	[1]