M. E. Vitali

2005
1	EE	M. Langenbuch, R. Bottini, M. E. Vitali, G. Ghidini: In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability. Microelectronics Reliability 45(5-6): 875-878 (2005)

Coauthor Index

1	R. Bottini	[1]
2	G. Ghidini	[1]
3	M. Langenbuch	[1]