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2005 | ||
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1 | EE | M. Langenbuch, R. Bottini, M. E. Vitali, G. Ghidini: In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability. Microelectronics Reliability 45(5-6): 875-878 (2005) |
1 | R. Bottini | [1] |
2 | G. Ghidini | [1] |
3 | M. Langenbuch | [1] |