2005 | ||
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1 | EE | D. Veyrié, D. Lellouchi, J.-L. Roux, F. Pressecq, A. Tetelin, C. Pellet: FTIR spectroscopy for the hermeticity assessment of micro-cavities. Microelectronics Reliability 45(9-11): 1764-1769 (2005) |
1 | D. Lellouchi | [1] |
2 | C. Pellet | [1] |
3 | F. Pressecq | [1] |
4 | J.-L. Roux | [1] |
5 | A. Tetelin | [1] |