2007 | ||
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2 | EE | Eric R. Marsh, Jeremiah A. Couey, R. Ryan Vallance, Allen Y. Yi: The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. IJMTM 12(1/2/3): 270-283 (2007) |
2005 | ||
1 | EE | Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, R. Ryan Vallance: In-process force monitoring for precision grinding semiconductor silicon wafers. IJMTM 7(5/6): 430-440 (2005) |
1 | Jeremiah A. Couey | [1] [2] |
2 | Byron R. Knapp | [1] |
3 | Eric R. Marsh | [1] [2] |
4 | Allen Y. Yi | [2] |