| |
| 2005 | ||
|---|---|---|
| 1 | EE | Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, R. Ryan Vallance: In-process force monitoring for precision grinding semiconductor silicon wafers. IJMTM 7(5/6): 430-440 (2005) |
| 1 | Jeremiah A. Couey | [1] |
| 2 | Eric R. Marsh | [1] |
| 3 | R. Ryan Vallance | [1] |