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J. C. Tinoco

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2003
1EEJ. C. Tinoco, Magali Estrada, G. Romero: Room temperature plasma oxidation mechanism to obtain ultrathin silicon oxide and titanium oxide layers. Microelectronics Reliability 43(6): 895-903 (2003)

Coauthor Index

1Magali Estrada [1]
2G. Romero [1]

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