J. C. Tinoco
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2003
1
EE
J. C. Tinoco,
Magali Estrada
,
G. Romero
: Room temperature plasma oxidation mechanism to obtain ultrathin silicon oxide and titanium oxide layers.
Microelectronics Reliability 43
(6): 895-903 (2003)
Coauthor
Index
1
Magali Estrada
[
1
]
2
G. Romero
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)