2007 | ||
---|---|---|
2 | EE | Tetsuaki Matsunawa, Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa, Eiichi Takahashi, Tsuneo Terasawa, Toshihiko Tanaka, Osamu Suga, Tetsuya Higuchi: Adaptive Optical Proximity Correction Using an Optimization Method. CIT 2007: 853-860 |
2000 | ||
1 | EE | Tsuneo Terasawa: Embedded tutorial: subwavelength lithography. ASP-DAC 2000: 295-300 |
1 | Tetsuya Higuchi | [2] |
2 | Tetsuaki Matsunawa | [2] |
3 | Masahiro Murakawa | [2] |
4 | Hirokazu Nosato | [2] |
5 | Hidenori Sakanashi | [2] |
6 | Osamu Suga | [2] |
7 | Eiichi Takahashi | [2] |
8 | Toshihiko Tanaka | [2] |