2007 | ||
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1 | EE | Tetsuaki Matsunawa, Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa, Eiichi Takahashi, Tsuneo Terasawa, Toshihiko Tanaka, Osamu Suga, Tetsuya Higuchi: Adaptive Optical Proximity Correction Using an Optimization Method. CIT 2007: 853-860 |
1 | Tetsuya Higuchi | [1] |
2 | Masahiro Murakawa | [1] |
3 | Hirokazu Nosato | [1] |
4 | Hidenori Sakanashi | [1] |
5 | Osamu Suga | [1] |
6 | Eiichi Takahashi | [1] |
7 | Toshihiko Tanaka | [1] |
8 | Tsuneo Terasawa | [1] |