| |
| 2005 | ||
|---|---|---|
| 1 | EE | Hideki Murakami, Wataru Mizubayashi, Hirokazu Yokoi, Atsushi Suyama, Seiichi Miyazaki: Electrical Characterization of Aluminum-Oxynitride Stacked Gate Dielectrics Prepared by a Layer-by-Layer Process of Chemical Vapor Deposition and Rapid Thermal Nitridation. IEICE Transactions 88-C(4): 640-645 (2005) |
| 1 | Seiichi Miyazaki | [1] |
| 2 | Wataru Mizubayashi | [1] |
| 3 | Hideki Murakami | [1] |
| 4 | Hirokazu Yokoi | [1] |