| |
| 1999 | ||
|---|---|---|
| 1 | EE | Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert: Surface science issues in plasma etching. IBM Journal of Research and Development 43(1): 181-198 (1999) |
| 1 | Marcus F. Doemling | [1] |
| 2 | Bernd E. E. Kastenmeier | [1] |
| 3 | Peter J. Matsuo | [1] |
| 4 | Gottlieb S. Oehrlein | [1] |
| 5 | Neal R. Rueger | [1] |
| 6 | Marc Schaepkens | [1] |