2003 | ||
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1 | EE | Werner Frammelsberger, Guenther Benstetter, Thomas Schweinboeck, Richard J. Stamp, Janice Kiely: Characterization of thin and ultra-thin SiO2 films and SiO2/Si interfaces with combined conducting and topographic atomic force microscopy. Microelectronics Reliability 43(9-11): 1465-1470 (2003) |
1 | Guenther Benstetter | [1] |
2 | Werner Frammelsberger | [1] |
3 | Janice Kiely | [1] |
4 | Thomas Schweinboeck | [1] |