| |
| 1993 | ||
|---|---|---|
| 1 | Jerome P. Silverman, Robert P. Rippstein, James M. Oberschmidt: X-ray lithography beamlines in the IBM Advanced Lithography Facility. IBM Journal of Research and Development 37(3): 395-410 (1993) | |
| 1 | James M. Oberschmidt | [1] |
| 2 | Robert P. Rippstein | [1] |