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Robert P. Rippstein

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1993
1 Jerome P. Silverman, Robert P. Rippstein, James M. Oberschmidt: X-ray lithography beamlines in the IBM Advanced Lithography Facility. IBM Journal of Research and Development 37(3): 395-410 (1993)

Coauthor Index

1James M. Oberschmidt [1]
2Jerome P. Silverman [1]

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