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| 2004 | ||
|---|---|---|
| 2 | EE | H. Zhou, F. G. Shi, B. Zhao, J. Yota: Effect of deposition methods on dielectric breakdown strength of PECVD low-k carbon doped silicon dioxide dielectric thin films. Microelectronics Journal 35(7): 571-576 (2004) |
| 2003 | ||
| 1 | EE | H. Zhou, F. G. Shi, B. Zhao: Thickness dependent dielectric breakdown of PECVD low-k carbon doped silicon dioxide dielectric thin films: modeling and experiments. Microelectronics Journal 34(4): 259-264 (2003) |
| 1 | J. Yota | [2] |
| 2 | B. Zhao | [1] [2] |
| 3 | H. Zhou | [1] [2] |