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2004 | ||
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2 | EE | H. Zhou, F. G. Shi, B. Zhao, J. Yota: Effect of deposition methods on dielectric breakdown strength of PECVD low-k carbon doped silicon dioxide dielectric thin films. Microelectronics Journal 35(7): 571-576 (2004) |
2003 | ||
1 | EE | H. Zhou, F. G. Shi, B. Zhao: Thickness dependent dielectric breakdown of PECVD low-k carbon doped silicon dioxide dielectric thin films: modeling and experiments. Microelectronics Journal 34(4): 259-264 (2003) |
1 | J. Yota | [2] |
2 | B. Zhao | [1] [2] |
3 | H. Zhou | [1] [2] |