| |
| 2008 | ||
|---|---|---|
| 1 | EE | Amit Kumar Gupta, Peter Lendermann, Appa Iyer Sivakumar, John Priyadi: Simulation analysis of cluster tool operations in wafer fabrication. Winter Simulation Conference 2008: 2141-2147 |
| 1 | Amit Kumar Gupta | [1] |
| 2 | Peter Lendermann | [1] |
| 3 | Appa Iyer Sivakumar | [1] |