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Susan C. Palmateer

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1997
1EEMordechai Rothschild, Anthony R. Forte, Roderick R. Kunz, Susan C. Palmateer, Janusz H. C. Sedlacek: Lithography at a wavelength of 193 nm. IBM Journal of Research and Development 41(1&2): 49-56 (1997)

Coauthor Index

1Anthony R. Forte [1]
2Roderick R. Kunz [1]
3Mordechai Rothschild [1]
4Janusz H. C. Sedlacek [1]

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