![]() | ![]() |
2005 | ||
---|---|---|
1 | EE | S. A. Rushworth, L. M. Smith, A. J. Kingsley, R. Odedra, R. Nickson, P. Hughes: Vapour pressure measurement of low volatility precursors. Microelectronics Reliability 45(5-6): 1000-1002 (2005) |
1 | P. Hughes | [1] |
2 | A. J. Kingsley | [1] |
3 | R. Nickson | [1] |
4 | S. A. Rushworth | [1] |
5 | L. M. Smith | [1] |