| |
| 2007 | ||
|---|---|---|
| 1 | EE | P. Szabo, B. Nemeth, Márta Rencz, Bernard Courtois: Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology CoRR abs/0711.3301: (2007) |
| 1 | Bernard Courtois | [1] |
| 2 | Márta Rencz | [1] |
| 3 | P. Szabo | [1] |