J. Munguía
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2004
1
EE
V. Sánchez
, J. Munguía,
M. Estrada
: Photo-CVD process for ultra thin SiO
2
films.
Microelectronics Reliability 44
(5): 885-888 (2004)
Coauthor
Index
1
M. Estrada
[
1
]
2
V. Sánchez
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
