2005 | ||
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1 | EE | U. Muehle, A. Lenk, R. Weiland, H. Lichte: Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation. Microelectronics Reliability 45(9-11): 1558-1561 (2005) |
1 | A. Lenk | [1] |
2 | H. Lichte | [1] |
3 | R. Weiland | [1] |