| |
| 2001 | ||
|---|---|---|
| 1 | EE | Takayuki Yamada, Masaru Moriwaki, Yoshinao Harada, Shinji Fujii, Koji Eriguchi: Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics. Microelectronics Reliability 41(5): 697-704 (2001) |
| 1 | Koji Eriguchi | [1] |
| 2 | Shinji Fujii | [1] |
| 3 | Yoshinao Harada | [1] |
| 4 | Takayuki Yamada | [1] |