| |
| 2008 | ||
|---|---|---|
| 2 | EE | Tung-Ho Lin, Fan-Tien Cheng, Aeo-Juo Ye, Wei-Ming Wu, Min-Hsiung Hung: A novel key-variable sifting algorithm for virtual metrology. ICRA 2008: 3636-3641 |
| 2006 | ||
| 1 | Tung-Ho Lin, Ming-Hsiung Hung, Rung-Chuan Lin, Fan-Tien Cheng: A Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing. ICRA 2006: 1054-1059 | |
| 1 | Fan-Tien Cheng | [1] [2] |
| 2 | Min-Hsiung Hung | [2] |
| 3 | Ming-Hsiung Hung | [1] |
| 4 | Rung-Chuan Lin | [1] |
| 5 | Wei-Ming Wu | [2] |
| 6 | Aeo-Juo Ye | [2] |