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2006 | ||
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1 | EE | R. Kinder, A. Vincze, M. Kuruc, R. Srnánek, B. Lojek, B. Sopko, D. Chren: Investigation of the implanted phosphorus in a boron doped SiGe epitaxial layer. Microelectronics Journal 37(7): 642-645 (2006) |
1 | D. Chren | [1] |
2 | R. Kinder | [1] |
3 | B. Lojek | [1] |
4 | B. Sopko | [1] |
5 | R. Srnánek | [1] |
6 | A. Vincze | [1] |