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1990 | ||
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2 | EE | Shintaro Ushio, Kenji Nishi, Shigeki Kuroda, Kazuhiko Kai, Jun Ueda: A fast three-dimensional process simulator OPUS/3D with access to two-dimensional simulation results. IEEE Trans. on CAD of Integrated Circuits and Systems 9(7): 745-751 (1990) |
1989 | ||
1 | EE | Kenji Nishi, Kouichi Sakamoto, Shigeki Kuroda, Jun Ueda, Tatsurou Miyoshi, Shintaro Ushio: A general-purpose two-dimensional process simulator-OPUS for arbitrary structures. IEEE Trans. on CAD of Integrated Circuits and Systems 8(1): 23-32 (1989) |
1 | Kazuhiko Kai | [2] |
2 | Tatsurou Miyoshi | [1] |
3 | Kenji Nishi | [1] [2] |
4 | Kouichi Sakamoto | [1] |
5 | Jun Ueda | [1] [2] |
6 | Shintaro Ushio | [1] [2] |