| |
| 2002 | ||
|---|---|---|
| 1 | EE | Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi: Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectronics Reliability 42(2): 201-209 (2002) |
| 1 | Koichi Ando | [1] |
| 2 | Tsuyoshi Hirata | [1] |
| 3 | Tadahiko Horiuchi | [1] |
| 4 | Nobuyuki Ikezawa | [1] |
| 5 | Shinya Ito | [1] |
| 6 | Hiroaki Namba | [1] |
| 7 | Takehiro Saitoh | [1] |
| 8 | Tatsuya Suzuki | [1] |