| |
| 2005 | ||
|---|---|---|
| 1 | EE | Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger: Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectronics Reliability 45(9-11): 1568-1571 (2005) |
| 1 | Guenther Benstetter | [1] |
| 2 | Peter Breitschopf | [1] |
| 3 | Werner Frammelsberger | [1] |