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Quazi D. M. Khosru

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2002
1EEAnri Nakajima, Quazi D. M. Khosru, Takashi Yoshimoto, Shin Yokoyama: Atomic-layer-deposited silicon-nitride/SiO2 stack--a highly potential gate dielectrics for advanced CMOS technology. Microelectronics Reliability 42(12): 1823-1835 (2002)

Coauthor Index

1Anri Nakajima [1]
2Shin Yokoyama [1]
3Takashi Yoshimoto [1]

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