| |
| 2007 | ||
|---|---|---|
| 1 | EE | V. Gonda, K. M. B. Jansen, L. J. Ernst, J. den Toonder, G. Q. Zhang: Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. Microelectronics Reliability 47(2-3): 248-251 (2007) |
| 1 | L. J. Ernst | [1] |
| 2 | K. M. B. Jansen | [1] |
| 3 | J. den Toonder | [1] |
| 4 | G. Q. Zhang | [1] |