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2007 | ||
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1 | EE | V. Gonda, K. M. B. Jansen, L. J. Ernst, J. den Toonder, G. Q. Zhang: Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. Microelectronics Reliability 47(2-3): 248-251 (2007) |
1 | L. J. Ernst | [1] |
2 | K. M. B. Jansen | [1] |
3 | J. den Toonder | [1] |
4 | G. Q. Zhang | [1] |