| |
| 1999 | ||
|---|---|---|
| 2 | EE | Stephen J. Fonash: Plasma processing damage in etching and deposition. IBM Journal of Research and Development 43(1): 103-108 (1999) |
| 1991 | ||
| 1 | EE | J. H. Smith, Kenneth M. Steer, Timothy F. Miller, Stephen J. Fonash: Numerical modeling of two-dimensional device structures using Brandt's multilevel acceleration scheme: application to Poisson's equation. IEEE Trans. on CAD of Integrated Circuits and Systems 10(6): 822-824 (1991) |
| 1 | Timothy F. Miller | [1] |
| 2 | J. H. Smith | [1] |
| 3 | Kenneth M. Steer | [1] |