| |
| 2002 | ||
|---|---|---|
| 1 | EE | O. Jeandupeux, V. Marsico, A. Acovic, P. Fazan, H. Brune, K. Kern: Use of scanning capacitance microscopy for controlling wafer processing. Microelectronics Reliability 42(2): 225-231 (2002) |
| 1 | A. Acovic | [1] |
| 2 | H. Brune | [1] |
| 3 | O. Jeandupeux | [1] |
| 4 | K. Kern | [1] |
| 5 | V. Marsico | [1] |