| |
| 2001 | ||
|---|---|---|
| 1 | EE | Kai F. Dombrowski, B. Dietrich, I. De Wolf, R. Rooyackers, G. Badenes: Investigation of stress in shallow trench isolation using UV micro-Raman spectroscopy. Microelectronics Reliability 41(4): 511-515 (2001) |
| 1 | G. Badenes | [1] |
| 2 | Kai F. Dombrowski | [1] |
| 3 | R. Rooyackers | [1] |
| 4 | I. De Wolf | [1] |