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2001 | ||
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1 | EE | L. Jalabert, Pierre Temple-Boyer, G. Sarrabayrouse, F. Cristiano, B. Colombeau, F. Voillot, C. Armand: Reduction of boron penetration through thin silicon oxide with a nitrogen doped silicon layer. Microelectronics Reliability 41(7): 981-985 (2001) |
1 | C. Armand | [1] |
2 | F. Cristiano | [1] |
3 | L. Jalabert | [1] |
4 | G. Sarrabayrouse | [1] |
5 | Pierre Temple-Boyer | [1] |
6 | F. Voillot | [1] |