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Paul G. Carey

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1988
1EEEttore Landi, Paul G. Carey, Thomas W. Sigmon: Numerical simulation of the gas immersion laser doping (GILD) process in silicon. IEEE Trans. on CAD of Integrated Circuits and Systems 7(2): 205-214 (1988)

Coauthor Index

1Ettore Landi [1]
2Thomas W. Sigmon [1]

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