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P. Beno

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2007
1EER. Kinder, F. Schwierz, P. Beno, J. Geßner: Simulation of boron diffusion in Si and strained SiGe layers. Microelectronics Journal 38(4-5): 576-582 (2007)

Coauthor Index

1J. Geßner [1]
2R. Kinder [1]
3F. Schwierz [1]

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