2002 | ||
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1 | EE | Yoshihiro Takao, Hiroshi Kudo, Junichi Mitani, Yoshiyuki Kotani, Satoshi Yamaguchi, Keizaburo Yoshie, Kazuo Sukegawa, Nobuhisa Naori, Satoru Asai, Michiari Kawano: A 0.11 mum CMOS technology featuring copper and very low k interconnects with high performance and reliability. Microelectronics Reliability 42(1): 15-25 (2002) |
1 | Michiari Kawano | [1] |
2 | Yoshiyuki Kotani | [1] |
3 | Hiroshi Kudo | [1] |
4 | Junichi Mitani | [1] |
5 | Nobuhisa Naori | [1] |
6 | Kazuo Sukegawa | [1] |
7 | Yoshihiro Takao | [1] |
8 | Satoshi Yamaguchi | [1] |
9 | Keizaburo Yoshie | [1] |