Xueyi You

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2006

1 EE Xia Xiao, Xueyi You, Suying Yao: Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method. Microelectronics Journal 37(10): 1052-1055 (2006)

2006
1	EE	Xia Xiao, Xueyi You, Suying Yao: Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method. Microelectronics Journal 37(10): 1052-1055 (2006)

Coauthor Index

1 Xia Xiao [1]

2 Suying Yao [1]