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Xia Xiao

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2006
1EEXia Xiao, Xueyi You, Suying Yao: Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method. Microelectronics Journal 37(10): 1052-1055 (2006)

Coauthor Index

1Suying Yao [1]
2Xueyi You [1]

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