| |
| 2008 | ||
|---|---|---|
| 2 | EE | Liangliang Yang, Yunfei Zhou, Haihong Pan, Wei Teng: Realization of the Synchronization Mechanism of Step and Scan Projection Lithography. ICIRA (2) 2008: 151-161 |
| 1 | EE | Wei Teng, Yunfei Zhou, Xiaoqing Li, Liangliang Yang: Design of Acceleration Feedforward and Study of Calibration Algorithm. ICIRA (2) 2008: 539-547 |
| 1 | Xiaoqing Li | [1] |
| 2 | Haihong Pan | [2] |
| 3 | Wei Teng | [1] [2] |
| 4 | Yunfei Zhou | [1] [2] |