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2008 | ||
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2 | EE | Liangliang Yang, Yunfei Zhou, Haihong Pan, Wei Teng: Realization of the Synchronization Mechanism of Step and Scan Projection Lithography. ICIRA (2) 2008: 151-161 |
1 | EE | Wei Teng, Yunfei Zhou, Xiaoqing Li, Liangliang Yang: Design of Acceleration Feedforward and Study of Calibration Algorithm. ICIRA (2) 2008: 539-547 |
1 | Xiaoqing Li | [1] |
2 | Haihong Pan | [2] |
3 | Wei Teng | [1] [2] |
4 | Yunfei Zhou | [1] [2] |