| |
| 2007 | ||
|---|---|---|
| 2 | EE | R. Hellin-Rico, J.-P. Celis, K. Baert, C. Van Hoof, Ann Witvrouw: A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C CoRR abs/0711.3317: (2007) |
| 2006 | ||
| 1 | EE | Ann Witvrouw: CMOS-MEMS integration: why, how and what? ICCAD 2006: 826-827 |
| 1 | K. Baert | [2] |
| 2 | J.-P. Celis | [2] |
| 3 | R. Hellin-Rico | [2] |
| 4 | C. Van Hoof | [2] |