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2006 | ||
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1 | EE | Li Ling, Long Shibing, Wang Congshun, Wu Wengang, Hao Yilong, Liu Ming: Modeling and simulation development of electron beam resist based on cellular automata. Microelectronics Journal 37(4): 317-320 (2006) |
1 | Wang Congshun | [1] |
2 | Li Ling | [1] |
3 | Liu Ming | [1] |
4 | Long Shibing | [1] |
5 | Hao Yilong | [1] |