| |
| 2006 | ||
|---|---|---|
| 1 | EE | Li Ling, Long Shibing, Wang Congshun, Wu Wengang, Hao Yilong, Liu Ming: Modeling and simulation development of electron beam resist based on cellular automata. Microelectronics Journal 37(4): 317-320 (2006) |
| 1 | Wang Congshun | [1] |
| 2 | Li Ling | [1] |
| 3 | Liu Ming | [1] |
| 4 | Wu Wengang | [1] |
| 5 | Hao Yilong | [1] |