| |
| 2004 | ||
|---|---|---|
| 1 | EE | Takashi Yoda, Hirokazu Ezawa, Kaori Tsutsumi, Makoto Honda: The sprint process of Al interconnects with low-temperature PVD via filling. IEICE Electronic Express 1(9): 263-268 (2004) |
| 1 | Hirokazu Ezawa | [1] |
| 2 | Makoto Honda | [1] |
| 3 | Takashi Yoda | [1] |