![]() | ![]() |
2008 | ||
---|---|---|
1 | EE | A. G. Chao, S. T. Tseng, D. S. H. Wong, S. S. Jang, S. P. Lee: Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing. Winter Simulation Conference 2008: 2330-2334 |
1 | A. G. Chao | [1] |
2 | S. S. Jang | [1] |
3 | S. P. Lee | [1] |
4 | D. S. H. Wong | [1] |