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S. T. Tseng

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2008
1EEA. G. Chao, S. T. Tseng, D. S. H. Wong, S. S. Jang, S. P. Lee: Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing. Winter Simulation Conference 2008: 2330-2334

Coauthor Index

1A. G. Chao [1]
2S. S. Jang [1]
3S. P. Lee [1]
4D. S. H. Wong [1]

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