T. Thurgate
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1991
1
EE
T. Thurgate: Segment-based etch algorithm and modeling.
IEEE Trans. on CAD of Integrated Circuits and Systems 10
(9): 1101-1109 (1991)
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)