2007 | ||
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4 | EE | Kah-Yoong Chan, Bee-San Teo: Investigation into the influence of direct current (DC) power in the magnetron sputtering process on the copper crystallite size. Microelectronics Journal 38(1): 60-62 (2007) |
2006 | ||
3 | EE | Kah-Yoong Chan, Bee-San Teo: Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations of copper thin films prepared by dc magnetron sputtering technique. Microelectronics Journal 37(10): 1064-1071 (2006) |
2 | EE | Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo: Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique. Microelectronics Journal 37(7): 608-612 (2006) |
1 | EE | Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo: Effects of substrate temperature on electrical and structural properties of copper thin films. Microelectronics Journal 37(9): 930-937 (2006) |
1 | Kah-Yoong Chan | [1] [2] [3] [4] |
2 | Teck-Yong Tou | [1] [2] |