J. G. Sun
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2005
1
EE
J. M. Zhang
, J. G. Sun: Quantitative assessment of subsurface damage depth in silicon wafers based on optical transmission properties.
IJMTM 7
(5/6): 540-552 (2005)
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1
J. M. Zhang
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Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)