2007 | ||
---|---|---|
1 | EE | Minoru Sasaki, Masahiro Ishimori, JongHyeong Song, Kazuhiro Hane: Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer. IEICE Transactions 90-C(1): 147-148 (2007) |
1 | Kazuhiro Hane | [1] |
2 | Masahiro Ishimori | [1] |
3 | Minoru Sasaki | [1] |