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Eiichi Soda

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2005
1EETakashi Nasuno, Yoshihisa Matsubara, Hiromasa Kobayashi, Akiyuki Minami, Eiichi Soda, Hiroshi Tsuda, Koichiro Tsujita, Wataru Wakamiya, Nobuyoshi Kobayashi: Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. IEICE Transactions 88-C(5): 796-803 (2005)

Coauthor Index

1Hiromasa Kobayashi [1]
2Nobuyoshi Kobayashi [1]
3Yoshihisa Matsubara [1]
4Akiyuki Minami [1]
5Takashi Nasuno [1]
6Hiroshi Tsuda [1]
7Koichiro Tsujita [1]
8Wataru Wakamiya [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)